2024.10 - How to evaluate radiation hardness of semiconductor devices using heavy ions and pulsed laser
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This invention provides a radiation hardness evaluation method for a semiconductor device under test, comprising: providing the device to a heavy-ion facility to measure its cross section (σ) values based on the linear energy transfer (LET) in the base region; providing the device to a pulsed laser system to measure its cross section based on laser energy values; and transforming the laser energy values to LET values to infer cross section values for non-base LET regions.
2023.03 - Inspection apparatus for semiconductor devices using a beam containing alpha particles
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This invention provides a testing apparatus for semiconductor devices, including: a stage where the test device is placed, an alpha particle source positioned above the stage for beam irradiation, and a beam control unit to adjust the beam’s irradiation angle. This enables precise control of the alpha beam angle for easy and accurate evaluation of the test device.
2022.07 - A semiconductor device inspection method, a semiconductor device radiation test system, a test beam evaluation method, and a test beam evaluation system using reference semiconductor device
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This invention provides a method to evaluate semiconductor radiation hardness using reference and non-reference devices on a test board irradiated with a radiation beam. Error values are measured and corrected using the reference device, enabling inference of the standard error for the non-reference device. The invention also allows evaluation of sensitive areas, error cross sections by energy, and Bragg peak location.
2022.07 - A semiconductor device radiation test method, and a semiconductor device radiation test system
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This patent provides a radiation evaluation system for semiconductor devices using reference and general test devices. The system derives standard error values for both and defines the standard error of the general test device as a ratio relative to the reference device’s error value.